
Corrected laser parts cleaning and drying deficiencies.
THE CLIENT
One of the world's leading suppliers of eximer laser light sources for semiconductor manufacturing.
THE CHALLENGE
Upgrade the laser optical component cleaning processes.
MC2 ACTIVITY
A Contamination Control Assessment of the facility, and review, testing, and evaluation of the parts ultrasonic cleaning and drying system was conducted.
FINDINGS
Serious deficiencies contributing to the presence of contamination on parts after cleaning were found. Most serious was the the lack of cavitation in the ultrasonic cleaning tank, resulting in the parts not being cleaned. In addition the parts rinsing was incorrectly designed, and the parts drying oven was found to be a contamination source. The facility was also incorrectly designed, and conditions were not sufficient to protect the product during assembly.
CORRECTIVE ACTION
Deficiencies in parts cleaning process and equipment, and in facility addressed.
RESULT
Desired optics cleanliness level achieved.

